Member Bibliography/Bibliografía de Miembros
This page collects all the personal publications that CienciaPR members have uploaded to their profiles. You can also see all of the authors collected in these publications or all the keywords contained in these publications.
Found 9 results
Author Title Type [ Year] Filters: Author is Vyhmeister, Eduardo [Clear All Filters]
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“In-Situ FTIR Kinetic Study in the Silylation of Low-k Films with Hexamethyldisilazane Dissolved in Supercritical CO2”, Chemical Engineering Communications, vol. 203, no. 7, pp. 908-916, 2016.
, “Study of low-k film functionalization and pore sealing using chlorosilanes dissolved in supercritical carbon dioxide”, Chemical Engineering Communications, vol. 203, no. 7, pp. 880-889, 2016.
, “In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide”, The Journal of Supercritical Fluids, vol. 90, pp. 134-143, 2014.
, “Surface modification of porous silicon-based films using dichlorosilanes dissolved in supercritical carbon dioxide”, Industrial & Engineering Chemistry Research, vol. 52, no. 13, pp. 4762-4771, 2013.
, “High-pressure phase equilibria for chlorosilane+ carbon dioxide mixtures”, Fluid phase equilibria, vol. 270, no. 1-2, pp. 121-128, 2008.
, “In-Situ Ftir Analysis Of Porous Low-K Film Repair”, The 2007 Annual Meeting. 2007.
, “Solubility and Binary Phase Equilibria of Chlorosilanes in Supercritical Carbon Dioxide”, 2007 AIChE Annual Meeting. 2007.
, “Study of Low-K Film Repair and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide”, 2007 AIChE Annual Meeting. 2007.
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