In-Situ Ftir Analysis Of Porous Low-K Film Repair
Submitted by L. Antonio Estévez on
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Title | In-Situ Ftir Analysis Of Porous Low-K Film Repair |
Publication Type | Conference Proceedings |
Year of Conference | 2007 |
Authors | Vyhmeister, E, Suleiman, D, L Estévez, A, Muscat, AJ |
Conference Name | The 2007 Annual Meeting |