X-ray photoelectron spectroscopy characterization of aluminum nitride surface oxides: thermal and hydrothermal evolution

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TitleX-ray photoelectron spectroscopy characterization of aluminum nitride surface oxides: thermal and hydrothermal evolution
Publication TypeJournal Article
Year of Publication2007
AuthorsDalmau, R, Collazo, R, Mita, S, Sitar, Z
JournalJournal of electronic materials
Volume36
Pagination414–419